Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508582 | Parallel single substrate marangoni module | Arthur Keigler, David G. Guarnaccia | 2016-11-29 |
| 9449862 | Parallel single substrate processing system | Arthur Keigler, Freeman Fisher | 2016-09-20 |
| 9421617 | Substrate holder | Arthur Keigler, David G. Guarnaccia | 2016-08-23 |
| 9293356 | Parallel single substrate processing system | Arthur Keigler, Freeman Fisher, Jonathan Haynes | 2016-03-22 |