Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530660 | Multiple directed self-assembly patterning process | Chin-Yuan Tseng, Chi-Cheng Hung, Chun-Kuang Chen, Kuan-Hsin Lo, Ru-Gun Liu +1 more | 2016-12-27 |
| 9449880 | Fin patterning methods for increased process margin | Chin-Yuan Tseng, Chi-Cheng Hung, Chun-Kuang Chen, Chih-Ming Lai, Huan-Just Lin +2 more | 2016-09-20 |
| 9383657 | Method and structure for lithography processes with focus monitoring and control | Jhih-Yu Wang, Chien-Yu Li, Iu-Ren Chen, Chi-Cheng Hung, Chun-Kuang Chen | 2016-07-05 |