Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9493346 | Capacitor with planarized bonding for CMOS-MEMS integration | Yi-Hsien Chang, Yi Heng Tsai, Tzu-Heng Wu, Chun-Ren Cheng, Chun-Wen Cheng | 2016-11-15 |
| 9446945 | Isolation structure for MEMS 3D IC integration | Yi Heng Tsai, Yi-Hsien Chang, Chun-Ren Cheng, Chun-Wen Cheng, Tzu-Heng Wu | 2016-09-20 |
| 9449867 | VHF etch barrier for semiconductor integrated microsystem | Tzu-Heng Wu, Yi-Hsien Chang, Kai-Chih Liang, Yi Heng Tsai, Chun-Ren Cheng +2 more | 2016-09-20 |
| 9417209 | Biosensing well array with protective layer | Yi-Hsien Chang, Shih-Wei Lin, Chun-Ren Cheng | 2016-08-16 |
| 9228974 | Biosensing well array by self-alignment and selective etching | Yi-Hsien Chang, Shih-Wei Lin, Chun-Ren Cheng | 2016-01-05 |