Issued Patents 2016
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9244366 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2016-01-26 |
| 9229326 | Method for integrated circuit patterning | Yen-Cheng Lu, Shu-Hao Chang, Jui-Ching Wu, Jeng-Horng Chen, Anthony Yen | 2016-01-05 |