Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529255 | Image process method to improve mask inspection performance | Meng-Lin Lu, Ching-Ting Yang, Chun-Jen Chen, Chien-Hung Lai | 2016-12-27 |
| 9377701 | Mask overlay control | Chih-Chiang Tu, Chun-Lang Chen, Chien-Chih Chen, Chen-Shao Hsu | 2016-06-28 |
| 9373551 | Moveable and adjustable gas injectors for an etching chamber | Tzung-Shiun Lu, Chun-Lang Chen, Shih-Hao Yang | 2016-06-21 |