Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513542 | Lithography mask and method of forming a lithography mask | Chue-San Yoo | 2016-12-06 |
| 9377701 | Mask overlay control | Chih-Chiang Tu, Jong-Yuh Chang, Chien-Chih Chen, Chen-Shao Hsu | 2016-06-28 |
| 9373551 | Moveable and adjustable gas injectors for an etching chamber | Tzung-Shiun Lu, Shih-Hao Yang, Jong-Yuh Chang | 2016-06-21 |