Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373551 | Moveable and adjustable gas injectors for an etching chamber | Tzung-Shiun Lu, Chun-Lang Chen, Jong-Yuh Chang | 2016-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373551 | Moveable and adjustable gas injectors for an etching chamber | Tzung-Shiun Lu, Chun-Lang Chen, Jong-Yuh Chang | 2016-06-21 |