Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9377701 | Mask overlay control | Chun-Lang Chen, Jong-Yuh Chang, Chien-Chih Chen, Chen-Shao Hsu | 2016-06-28 |
| 9367661 | Apparatus and method for e-beam writing | Jia-Guei Jou, Yi-Chiuan Luo, Chih-Chung Huang, Chi-Ming Tsai | 2016-06-14 |
| 9324178 | Three-dimensional semiconductor image reconstruction apparatus and method | Wen-Hao Cheng, Chung-Min Fu, Ajay Nandoriya | 2016-04-26 |