Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9367661 | Apparatus and method for e-beam writing | Jia-Guei Jou, Yi-Chiuan Luo, Chi-Ming Tsai, Chih-Chiang Tu | 2016-06-14 |
| 9230867 | Structure and method for E-beam in-chip overlay mark | Dong-Hsu Cheng, Ming-Ho Tsai, Yung-Hsiang Chen, Jyun-Hong Chen | 2016-01-05 |