Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466101 | Detection of defects on wafer during semiconductor fabrication | Chun-Hsien Lin, Liu Bo-Tsun, Chin-Ti Ko, Wu Cheng-Hung, Kuo-Hung Chao +3 more | 2016-10-11 |
| 9282592 | Rotatable heating-cooling plate and element in proximity thereto | Jui-Chun Peng, Jacky Chung, Chun-Hung Lin | 2016-03-08 |
| 9228827 | Flexible wafer leveling design for various orientation of line/trench | Kuo-Hung Chao, Jui-Chun Peng | 2016-01-05 |