Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514928 | Selective repairing process for barrier layer | Chih-Chien Chi, Chung-Chi Ko, Mei-Ling Chen, Huang-Yi Huang, Szu-Ping Tung | 2016-12-06 |
| 9487864 | Metal capping process and processing platform thereof | Chih-Chien Chi, Szu-Ping Tung, Huang-Yi Huang | 2016-11-08 |
| 9472449 | Semiconductor structure with inlaid capping layer and method of manufacturing the same | Kuan-Chia Chen, Shing-Chyang Pan, Chih-Chien Chi | 2016-10-18 |
| 9385086 | Bi-layer hard mask for robust metallization profile | Shing-Chyang Pan, Hong-Hui Hsu | 2016-07-05 |
| 9330915 | Surface pre-treatment for hard mask fabrication | Shing-Chyang Pan, Hong-Hui Hsu, Yao-Jen Chang | 2016-05-03 |
| 9324606 | Self-aligned repairing process for barrier layer | Chih-Chien Chi, Chung-Chi Ko, Mei-Ling Chen, Huang-Yi Huang, Szu-Ping Tung | 2016-04-26 |
| 9275894 | Method for forming semiconductor device structure | Chi-Feng Lin, Kuan-Chia Chen | 2016-03-01 |