Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9385086 | Bi-layer hard mask for robust metallization profile | Shing-Chyang Pan, Ching-Hua Hsieh | 2016-07-05 |
| 9330915 | Surface pre-treatment for hard mask fabrication | Shing-Chyang Pan, Ching-Hua Hsieh, Yao-Jen Chang | 2016-05-03 |