Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449821 | Composite hard mask etching profile for preventing pattern collapse in high-aspect-ratio trenches | Zusing Yang | 2016-09-20 |
| 9349746 | Method of fabricating deep trench semiconductor devices, and deep trench semiconductor devices | Ta-Hone Yang, Nan-Tsu Lian, Sheng-Yuan Chang, Kuang-Chao Chen | 2016-05-24 |
| 9252153 | Method of word-line formation by semi-damascene process with thin protective conductor layer | Cheng-Yi Lung, Ta-Hung Yang | 2016-02-02 |