Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9252153 | Method of word-line formation by semi-damascene process with thin protective conductor layer | Cheng-Yi Lung, An Chyi Wei | 2016-02-02 |
| 9236219 | Measurement of line-edge-roughness and line-width-roughness on pre-layered structures | Yu-Chung Chen, Shin-Chang Tsai | 2016-01-12 |