Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449821 | Composite hard mask etching profile for preventing pattern collapse in high-aspect-ratio trenches | An Chyi Wei | 2016-09-20 |
| 9337036 | Method of forming copper sulfide film for reducing copper oxidization and loss | Hong-Ji Lee | 2016-05-10 |
| 9287285 | Self-aligned liner method of avoiding PL gate damage | Fang-Hao Hsu, Hong-Ji Lee | 2016-03-15 |