Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466610 | Method of fabricating three-dimensional gate-all-around vertical gate structures and semiconductor devices, and three-dimensional gate-all-round vertical gate structures and semiconductor devices thereof | — | 2016-10-11 |
| 9349746 | Method of fabricating deep trench semiconductor devices, and deep trench semiconductor devices | Nan-Tsu Lian, An Chyi Wei, Sheng-Yuan Chang, Kuang-Chao Chen | 2016-05-24 |
| 9305794 | Etching method and etching composition | — | 2016-04-05 |
| 9244112 | Method for detecting an electrical defect of contact/via plugs | Hsiang-Chou Liao, Tuung Luoh, Ling Yang, Kuang-Chao Chen | 2016-01-26 |