Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502210 | Ion implanter, ion implantation method, and beam measurement apparatus | Makoto Sano, Mitsukuni Tsukihara, Haruka Sasaki | 2016-11-22 |
| 9466467 | Ion implantation apparatus | Mitsuaki Kabasawa, Kazuhiro Watanabe, Hitoshi Ando, Tatsuya Yamada | 2016-10-11 |
| 9390890 | High-energy ion implanter | Mitsuaki Kabasawa, Kazuhiro Watanabe, Haruka Sasaki | 2016-07-12 |
| 9355847 | High-energy ion implanter | Mitsuaki Kabasawa, Kazuhiro Watanabe, Haruka Sasaki, Makoto Sano | 2016-05-31 |
| 9269541 | High energy ion implanter, beam current adjuster, and beam current adjustment method | Kouji Kato | 2016-02-23 |