Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502210 | Ion implanter, ion implantation method, and beam measurement apparatus | Makoto Sano, Haruka Sasaki, Kouji Inada | 2016-11-22 |
| 9449791 | Beam irradiation apparatus and beam irradiation method | Noriyasu Ido, Noriyuki Suetsugu | 2016-09-20 |