Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449791 | Beam irradiation apparatus and beam irradiation method | Mitsukuni Tsukihara, Noriyuki Suetsugu | 2016-09-20 |
| 9412561 | Ion implantation method and ion implantation apparatus | Takeshi Kurose, Hiroyuki Kariya | 2016-08-09 |