Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502210 | Ion implanter, ion implantation method, and beam measurement apparatus | Makoto Sano, Mitsukuni Tsukihara, Kouji Inada | 2016-11-22 |
| 9390890 | High-energy ion implanter | Mitsuaki Kabasawa, Kazuhiro Watanabe, Kouji Inada | 2016-07-12 |
| 9355847 | High-energy ion implanter | Mitsuaki Kabasawa, Kazuhiro Watanabe, Kouji Inada, Makoto Sano | 2016-05-31 |
| 9343262 | Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method | Takanori Yagita, Mitsuaki Kabasawa | 2016-05-17 |
| 9343263 | Ion implanter, beam energy measuring device, and method of measuring beam energy | Kazuhiro Watanabe, Hiroyuki Kariya | 2016-05-17 |