Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520265 | Ion implantation apparatus | — | 2016-12-13 |
| 9431214 | Ion implantation apparatus | Hiroshi Matsushita, Mitsuaki Kabasawa, Yoshitaka Amano | 2016-08-30 |
| 9343262 | Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method | Mitsuaki Kabasawa, Haruka Sasaki | 2016-05-17 |
| 9293295 | Ion implantation apparatus, final energy filter, and ion implantation method | — | 2016-03-22 |
| 9236222 | Ion implantation apparatus and ion implantation method | Mitsuaki Kabasawa | 2016-01-12 |