Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373481 | High-energy ion implanter, beam collimator, and beam collimation method | Yoshitaka Amamo | 2016-06-21 |
| 9269541 | High energy ion implanter, beam current adjuster, and beam current adjustment method | Kouji Inada | 2016-02-23 |