Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513562 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Matthias Orth, Norbert Muehlberger, Thorsten Rassel +1 more | 2016-12-06 |