Issued Patents 2016
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9250522 | Positive resist composition and patterning process | Koji Hasegawa, Masayoshi Sagehashi | 2016-02-02 |
| 9250517 | Polymer, positive resist composition and patterning process | Masayoshi Sagehashi, Koji Hasegawa | 2016-02-02 |
| 9244350 | Positive resist composition and patterning process | Masayoshi Sagehashi | 2016-01-26 |
| 9233919 | Sulfonium salt-containing polymer, resist composition, patterning process, and sulfonium salt monomer and making method | Youichi Ohsawa, Masaki Ohashi, Seiichiro Tachibana | 2016-01-12 |