Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488906 | Photomask blank and method for manufacturing photomask blank | Yukio Inazuki, Takashi Yoshii, Toyohisa Sakurada, Akira Ikeda, Satoshi Watanabe +1 more | 2016-11-08 |
| 9400422 | Method for manufacturing photomask blank | Takashi Yoshii, Yoshio Kawai, Yukio Inazuki, Satoshi Watanabe, Akira Ikeda +1 more | 2016-07-26 |
| 9366951 | Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method | Yukio Inazuki, Toyohisa Sakurada, Takuro Kosaka, Kouhei Sasamoto | 2016-06-14 |