Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9366951 | Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method | Yukio Inazuki, Toyohisa Sakurada, Hideo Kaneko, Kouhei Sasamoto | 2016-06-14 |