Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9440375 | Blank for mold production and method for manufacturing mold | Souichi Fukaya, Hideo Nakagawa | 2016-09-13 |
| 9366951 | Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method | Yukio Inazuki, Toyohisa Sakurada, Hideo Kaneko, Takuro Kosaka | 2016-06-14 |
| 9268212 | Photomask blank and method for manufacturing photomask | Souichi Fukaya, Hideo Nakagawa | 2016-02-23 |