Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488906 | Photomask blank and method for manufacturing photomask blank | Yukio Inazuki, Takashi Yoshii, Toyohisa Sakurada, Akira Ikeda, Hideo Kaneko +1 more | 2016-11-08 |
| 9400422 | Method for manufacturing photomask blank | Takashi Yoshii, Yukio Inazuki, Satoshi Watanabe, Akira Ikeda, Toyohisa Sakurada +1 more | 2016-07-26 |
| 9244348 | Chemically amplified negative resist composition and pattern forming process | Keiichi Masunaga, Satoshi Watanabe, Luisa D. Bozano, Ratnam Sooriyakumaran | 2016-01-26 |