Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500949 | Chemically-amplified positive resist composition and resist patterning process using the same | Keiichi Masunaga, Satoshi Watanabe, Masaki Ohashi, Masahiro Fukushima | 2016-11-22 |
| 9436083 | Chemically-amplified negative resist composition and resist patterning process using the same | Keiichi Masunaga, Satoshi Watanabe | 2016-09-06 |
| 9348227 | Chemically amplified resist composition and pattern forming process | Masahiro Fukushima, Keiichi Masunaga, Satoshi Watanabe | 2016-05-24 |
| 9329476 | Chemically amplified negative resist composition and patterning process | Keiichi Masunaga, Satoshi Watanabe, Masaki Ohashi | 2016-05-03 |
| 9285678 | Sulfonium salt, resist composition and resist pattern forming process | Keiichi Masunaga, Masayoshi Sagehashi, Satoshi Watanabe | 2016-03-15 |