Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455206 | Overlay measuring method and system, and method of manufacturing semiconductor device using the same | Seong Jin YUN, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun | 2016-09-27 |
| 9417055 | Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film | Sung Yoon Ryu, Sang-Kil Lee, Chung-Sam Jun, Ho-Jeong Kwak, Souk Kim +2 more | 2016-08-16 |
| 9261532 | Conductive atomic force microscope and method of operating the same | Hyun-Woo Kim, Young Hwan Kim, Jeong Hoi Kim, Baek-man Sung, Hyung-Su Son +5 more | 2016-02-16 |
| 9255694 | Reflector structure of illumination optic system | Won-Don Joo, Yu-Sin Yang, Sue-Jin Cho, Sang Don Jang, Byeong Hwan Jeon | 2016-02-09 |