Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455206 | Overlay measuring method and system, and method of manufacturing semiconductor device using the same | Seong Jin YUN, Woo-Seok Ko, Yu-Sin Yang, Sang-Kil Lee | 2016-09-27 |
| 9417055 | Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film | Sung Yoon Ryu, Sang-Kil Lee, Woo-Seok Ko, Ho-Jeong Kwak, Souk Kim +2 more | 2016-08-16 |
| 9261532 | Conductive atomic force microscope and method of operating the same | Hyun-Woo Kim, Woo-Seok Ko, Young Hwan Kim, Jeong Hoi Kim, Baek-man Sung +5 more | 2016-02-16 |