Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425036 | Light source device and semiconductor manufacturing apparatus including the same | Wook Kim, Hashimoto Kohei, Won-Don Joo, Kwang Soo Kim, Sue-Jin Cho | 2016-08-23 |
| 9374883 | Plasma light source apparatus and plasma light generating method | Young Kyu Park, Wook Kim, Hashimoto Kohei | 2016-06-21 |
| 9305764 | Plasma light source, inspection apparatus including plasma light source, and method of generating plasma light | Young Kyu Park, Wook Kim, Kwang Soo Kim, Tae-Joong Kim | 2016-04-05 |
| 9255694 | Reflector structure of illumination optic system | Won-Don Joo, Woo-Seok Ko, Yu-Sin Yang, Sue-Jin Cho, Sang Don Jang | 2016-02-09 |