Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507272 | Apparatus and method of controlling chuck, and exposure apparatus and control method thereof | Ja Yul Kim, Tae Kyu Son | 2016-11-29 |
| 9436098 | Maskless exposure device, maskless exposure method and display substrate manufactured by the maskless exposure device and the maskless exposure method | Jung-Chul Heo, Hi-Kuk Lee, Jae-Hyuk Chang, Sang Hyun Lee, Jung-In Park +8 more | 2016-09-06 |
| 9366975 | Stage transferring device and position measuring method thereof | Hi-Kuk Lee, Jae-Hyuk Chang, Hyang-Shik Kong, Cha-Dong Kim, Chang Hoon Kim +2 more | 2016-06-14 |
| 9329504 | Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film | Sang Hyun Park, Dong Seok Baek, Ki Hyun Kim, Sang Min Lee, Dong-Min Kim | 2016-05-03 |
| 9287155 | Apparatus and method of controlling chuck, and exposure apparatus and control method thereof | Ja Yul Kim, Tae Kyu Son | 2016-03-15 |
| 9255694 | Reflector structure of illumination optic system | Won-Don Joo, Woo-Seok Ko, Yu-Sin Yang, Sue-Jin Cho, Byeong Hwan Jeon | 2016-02-09 |