Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507272 | Apparatus and method of controlling chuck, and exposure apparatus and control method thereof | Ja Yul Kim, Sang Don Jang | 2016-11-29 |
| 9287155 | Apparatus and method of controlling chuck, and exposure apparatus and control method thereof | Ja Yul Kim, Sang Don Jang | 2016-03-15 |