Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406117 | Inspection system and method for inspecting line width and/or positional errors of a pattern | Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara, Eiji Sawa +4 more | 2016-08-02 |
| 9373424 | Electron beam writing apparatus and electron beam writing method | Takahito Nakayama | 2016-06-21 |
| 9343266 | Charged particle beam pattern writing method and charged particle beam writing apparatus that corrects beam rotation utilizing a correlation table | Munehiro Ogasawara, Shuichi Tamamushi | 2016-05-17 |
| 9236223 | Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method | Takahito Nakayama | 2016-01-12 |