Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406117 | Inspection system and method for inspecting line width and/or positional errors of a pattern | Takanao Touya, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara, Eiji Sawa +4 more | 2016-08-02 |
| 9343266 | Charged particle beam pattern writing method and charged particle beam writing apparatus that corrects beam rotation utilizing a correlation table | Munehiro Ogasawara, Takanao Touya | 2016-05-17 |