Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530610 | Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams | Kazuhiro Chiba, Hiroshi Matsumoto, Ryoichi Yoshikawa, Hirofumi Morita, Hirokazu Yamada +6 more | 2016-12-27 |
| 9343266 | Charged particle beam pattern writing method and charged particle beam writing apparatus that corrects beam rotation utilizing a correlation table | Takanao Touya, Shuichi Tamamushi | 2016-05-17 |
| 9343268 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa | 2016-05-17 |
| 9299535 | Multi charged particle beam writing apparatus | — | 2016-03-29 |