Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530610 | Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams | Kazuhiro Chiba, Hiroshi Matsumoto, Munehiro Ogasawara, Ryoichi Yoshikawa, Hirokazu Yamada +6 more | 2016-12-27 |
| 9391029 | Electronic device | Shinya Hayashiyama, Tomokazu Yuasa, Tomofumi Miyamoto, Daisuke Maehara | 2016-07-12 |
| 9330881 | Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus | Hiroshi Matsumoto | 2016-05-03 |