Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460502 | Defect inspection apparatus using images obtained by optical path adjusted | Hiromu Inoue | 2016-10-04 |
| 9423356 | Illumination apparatus and inspection apparatus | Riki Ogawa, Hiroyuki Nagahama | 2016-08-23 |
| 9406117 | Inspection system and method for inspecting line width and/or positional errors of a pattern | Takanao Touya, Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Eiji Sawa +4 more | 2016-08-02 |
| 9365507 | Diaryl sulfone compound, and manufacturing method for same | Paul Kuad, Hisaaki Kanda, Hiroyuki Shiraishi | 2016-06-14 |
| 9353772 | Hydraulic control apparatus | — | 2016-05-31 |