Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362163 | Methods and apparatuses for atomic layer cleaning of contacts and vias | Michal Danek, Aaron R. Fellis, Francisco Juarez, Chiukin Steven Lai | 2016-06-07 |
| 9240347 | Tungsten feature fill | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Deqi Wang | 2016-01-19 |