Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362163 | Methods and apparatuses for atomic layer cleaning of contacts and vias | Michal Danek, Juwen Gao, Aaron R. Fellis, Francisco Juarez | 2016-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362163 | Methods and apparatuses for atomic layer cleaning of contacts and vias | Michal Danek, Juwen Gao, Aaron R. Fellis, Francisco Juarez | 2016-06-07 |