Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240347 | Tungsten feature fill | Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang | 2016-01-19 |
| 9236297 | Low tempature tungsten film deposition for small critical dimension contacts and interconnects | Feng Chen, Raashina Humayun, Michal Danek | 2016-01-12 |