Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236297 | Low tempature tungsten film deposition for small critical dimension contacts and interconnects | Raashina Humayun, Michal Danek, Anand Chandrashekar | 2016-01-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236297 | Low tempature tungsten film deposition for small critical dimension contacts and interconnects | Raashina Humayun, Michal Danek, Anand Chandrashekar | 2016-01-12 |