Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9404873 | Wafer inspection with multi-spot illumination and multiple channels | Stephen Biellak | 2016-08-02 |
| 9291575 | Wafer inspection | Guoheng Zhao, Jenn-Kuen Leong | 2016-03-22 |
| 9279774 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll +2 more | 2016-03-08 |