Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9279774 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2016-03-08 |
| 9273952 | Grazing and normal incidence interferometer having common reference surface | Dieter Mueller, Rainer Schierle | 2016-03-01 |