Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513565 | Using wafer geometry to improve scanner correction effectiveness for overlay control | Craig MacNaughton, Sathish Veeraraghavan, Pradeep Vukkadala, Amir Azordegan | 2016-12-06 |
| 9430593 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Pradeep Vukkadala, Sathish Veeraraghavan, Haiguang Chen, Michael D. Kirk | 2016-08-30 |
| 9373165 | Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance | Amir Azordegan, Pradeep Vukkadala, Craig MacNaughton | 2016-06-21 |
| 9354526 | Overlay and semiconductor process control using a wafer geometry metric | Pradeep Vukkadala, Sathish Veeraraghavan | 2016-05-31 |
| 9355440 | Detection of selected defects in relatively noisy inspection data | Haiguang Chen, Michael D. Kirk, Stephen Biellak | 2016-05-31 |