Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9430593 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Pradeep Vukkadala, Sathish Veeraraghavan, Jaydeep Sinha, Michael D. Kirk | 2016-08-30 |
| 9355440 | Detection of selected defects in relatively noisy inspection data | Michael D. Kirk, Stephen Biellak, Jaydeep Sinha | 2016-05-31 |