Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378940 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Norihiro Ito, Jun Nogami, Kotaro Ooishi, Itaru Kanno | 2016-06-28 |
| 9231510 | Control device for rotary machine and inductance measurement method for rotary machine | Tetsuya Kojima, Shoji Adachi | 2016-01-05 |
| 9231511 | Control device of AC rotating machine | Masato Ito, Satoru Terashima | 2016-01-05 |