XL

Xiaoxu Lu

KL Kla-Tencor: 3 patents #33 of 327Top 15%
Overall (2016): #50,259 of 481,213Top 15%
3
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9525265 Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms Yung-Ho Alex Chuang, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden 2016-12-20
9509112 CW DUV laser with improved stability Yung-Ho Alex Chuang, John Fielden 2016-11-29
9494531 Multi-spot illumination for improved detection sensitivity Yung-Ho Alex Chuang, John Fielden, Ivan Maleev 2016-11-15