Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417515 | Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor | Cara Beasley, Abhijit Basu Mallick, Ralf Hofmann, Nitin K. Ingle | 2016-08-16 |